TGV 3D Viewer
The TGV 3D Viewer is the optimal solution for measuring Through Glass Via (TGV) side-wall profile, roughness, top/middle/bottom CD, roundness, via axis perpendicularity, and cylindricity. It is the most powerful non-destructive equipment on the market, capable of inspecting laser-induced glass modification defects (before etching), via etching defects, center deviation, and via waist height variation.
nFeatures
nPanel-level inspection for TGV interposers
nNon-contact, non-destructive measurement for side-wall profile, roughness, roundness, etc.
nEasy intergration with production lines
nSpecifications:
| System Model | TGV Viewer |
| Wafer size |
300 mm x 300 mm |
| Inspection items |
TGV, TCD/MCD/BCD, height, side wall profile and roughness, roundness, center deviation |
| Resolution*1 |
Lateral: 1 μm, Axial: 2.5 μm |
| Glass thickness*2 |
300 μm ~ 1100 μm |
| Light source |
LED & laser |
| Working distance (for multi lens) |
3 mm ~ 45 mm (depends on option module) |
| Lens |
2X, 4X (1X, 8X options) |
| Chuck |
Standard (or Customized) and vacuum |
| Air |
VAC -80k Pa，CDA 5~7 kg/cm^2 |
| System configuration |
XY(400x400 mm with 1 mm resolution) Z(14 mm with 1 mm resolution) |
| Electric discharger |
Option |
| Cleanliness |
Class 1000 |
| Networking |
Option |
| Main controller |
Windows 11 with height-speed USB, 4-port GbE card |
| System power |
220 VAC |
| Safety compatibility |
SEMI S2 compliant |
*Note 1,2 : Contact us for other specifications