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Metal pillar height inspection tool3
https://www.omsure.com/zh/ 歐美科技股份有限公司
首頁 產品介紹 CMP Inspection Metal pillar height inspection tool
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Metal pillar height inspection tool

Metal pillar height inspection tool

SSpecifications

Objectives

10X, 20X, 50X

Field of View

74x74um2 ~ 440x440um2

Vertical scan range

100μm (optional: ~400μm)

Pillar extrusion height resolution(Vertical resolution

10 nm

Lateral resolution

0.6 ~ 1.1μm

1591438