Metal pillar height inspection tool
Metal pillar height inspection tool
Specifications
|
Objectives |
10X, 20X, 50X |
| Field of View | 74x74um2 ~ 440x440um2 |
| Vertical scan range | 100μm (optional: ~400μm) |
| Pillar extrusion height resolution（Vertical resolution） | 10 nm |
| Lateral resolution | 0.6 ~ 1.1μm |