Ultra high-speed TSV sensor head module

Function: sensing TSV depth; trench depth; oxide, nitride, PR, PI film thickness

Specifications：

Spot size (4 options):

• Model W5050: spot size 50μm
• Model W2525: spot size 25μm
• Model W0707: spot size 7μm
• Model W0735: spot size 7x35μm

TSV aspect ratio: >30 @ Top CD 3~5 μm
Film thickness range: 500 Å ~ 30 μm