Film Metrology Unit
Function: automatic measurement for oxide, nitride, PR, PI film thickness; wafer profile
- automatic measurement for oxide, nitride, PR, PI film thickness;
- wafer profile (warpage)
•Specification：
•Spot size (3 options): 50μm、25μm、7μm
•Film thickness range: 500 Å ~ 30 μm
•Wafer stage : Customised