Metal pillar height inspection tool
Metal pillar height inspection tool
|
Objectives |
10X, 20X, 50X |
|
Field of View |
74x74um2 ~ 440x440um2 |
|
Vertical scan range |
100μm (optional: ~400μm) |
|
Pillar extrusion height resolution（Vertical resolution） |
10 nm |
|
Lateral resolution |
0.6 ~ 1.1μm |